Laser micromachining for manufacturing MEMS devices
نویسنده
چکیده
Applications of laser micromachining to the manufacture and prototyping of MEMS and MOEMS devices are presented. Examples of microturbines, biofactory on a chip, microfluidic components and microoptical elements manufactured by laser micromachining are described.
منابع مشابه
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تاریخ انتشار 2001